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Comprehensive microsystems

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Tabata, Osamu, (1956-)

Comprehensive microsystems

Record Type:	Language materials, printed : Monograph/item
Title/Author:	Comprehensive microsystems/ editors-in-chief, Yogesh B. Gianchandani, OsamuTabata, Hans Zappe.
other author:	Gianchandani, Yogesh B.
Published:	Amsterdam ;Elsevier, : c2008.,
Description:	3 v. :ill. (some col.) ; : 28 cm.;
Subject:	Microelectromechanical systems. -
Online resource:	click for full text (2015 TAEBDC PDA eBooks Trial, Trial Period: 2015.6.3-2015.12.31)
ISBN:	9780444521903 (electronic bk.)

Comprehensive microsystems
Comprehensive microsystems[electronic resource] /editors-in-chief, Yogesh B. Gianchandani, OsamuTabata, Hans Zappe. - Amsterdam ;Elsevier,c2008. - 3 v. :ill. (some col.) ;28 cm.

Includes bibliographical references and index.

v. 1. Materials ; Fabrication and packaging ;Electronics and systems design -- v. 2. Actuation mechanism ; Physical sensing ; Chemical and biological systems -- v. 3. Optical systems ; Industrial applications ; Emerging topics ; Index.

ISBN: 9780444521903 (electronic bk.) Subjects--Topical Terms:

559134
Microelectromechanical systems.

LC Class. No.: TK7875 / .C66 2008

Dewey Class. No.: 621.381

Comprehensive microsystems
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008 150720s2008 ne a sb 001 0 eng d
020 $a 9780444521903 (electronic bk.)
020 $a 9780444521903 (set)
035 $a 13000667
040 $a STF $b eng $c STF $d STF $d OKU $d OPELS $d OCLCQ $d UIU
041 0 $a eng
050 4 $a TK7875 $b .C66 2008
082 0 4 $a 621.381 $2 22
245 0 0 $a Comprehensive microsystems $h [electronic resource] / $c editors-in-chief, Yogesh B. Gianchandani, OsamuTabata, Hans Zappe.
260 $a Amsterdam ; $a Oxford : $b Elsevier, $c c2008.
300 $a 3 v. : $b ill. (some col.) ; $c 28 cm.
504 $a Includes bibliographical references and index.
505 0 $a v. 1. Materials ; Fabrication and packaging ;Electronics and systems design -- v. 2. Actuation mechanism ; Physical sensing ; Chemical and biological systems -- v. 3. Optical systems ; Industrial applications ; Emerging topics ; Index.
650 0 $a Microelectromechanical systems. $3 559134
700 1 $a Gianchandani, Yogesh B. $3 902995
700 1 $a Tabata, Osamu, $d 1956- $3 902996
700 1 $a Zappe, Hans P. $3 775386
856 4 0 $u http://www.sciencedirect.com/science/referenceworks/9780444521903 $z click for full text (2015 TAEBDC PDA eBooks Trial, Trial Period: 2015.6.3-2015.12.31)

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