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Microengineering, MEMS, and interfac...

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Banks, Danny.

Microengineering, MEMS, and interfacing : = a practical guide /

Record Type:	Language materials, printed : Monograph/item
Title/Author:	Microengineering, MEMS, and interfacing :/ Danny Banks.
Reminder of title:	a practical guide /
Author:	Banks, Danny.
Published:	Boca Raton, Fla. :CRC/Taylor & Francis, : 2006.,
Description:	326 p. :ill. ; : 24 cm.;
Subject:	Microelectromechanical systems. -
Online resource:	http://www.crcnetbase.com/doi/book/10.1201/9781420015416
ISBN:	9780824723057

Microengineering, MEMS, and interfacing : = a practical guide /
Banks, Danny.

Microengineering, MEMS, and interfacing :a practical guide /Danny Banks. - Boca Raton, Fla. :CRC/Taylor & Francis,2006. - 326 p. :ill. ;24 cm. - Mechanical engineering ;199.

Includes bibliographical references and index.

ISBN: 9780824723057

LCCN: 2006042635Subjects--Topical Terms:

559134
Microelectromechanical systems.

LC Class. No.: TK7875 / .B36 2006

Dewey Class. No.: 621

Microengineering, MEMS, and interfacing : = a practical guide /
LDR:00974cam a2200253 a 4500 001 664101
003 FlBoTFG
005 20061228100708.0
008 110106s2006 flua b 001 0 eng
010 $a 2006042635
020 $a 9780824723057
020 $a 0824723058 (alk. paper)
035 $a CRC00DK3182000
040 $a DLC $c DLC $d YDX $d BAKER $d OCLCQ $d DLC $d FlBoTFG
050 0 0 $a TK7875 $b .B36 2006
082 0 0 $a 621 $2 22
092 $a 621 $b B218
100 1 $a Banks, Danny. $3 761176
245 1 0 $a Microengineering, MEMS, and interfacing : $b a practical guide / $c Danny Banks.
260 $a Boca Raton, Fla. : $b CRC/Taylor & Francis, $c 2006.
300 $a 326 p. : $b ill. ; $c 24 cm.
490 0 $a Mechanical engineering ; $v 199
504 $a Includes bibliographical references and index.
530 $a Also available as an electronic resource. $b CRC Press (http://www.crcpress.com)
650 0 $a Microelectromechanical systems. $3 559134
856 4 0 $3 Publisher description $u http://www.crcnetbase.com/doi/book/10.1201/9781420015416
945 $a BRFL - 001 and 003 fields altered to contain TFG custom control number - 2010/03/12

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