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Micro electronic and mechanical syst...

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Yun Man, Zheng.

Micro electronic and mechanical systems /

Record Type:	Language materials, printed : Monograph/item
Title/Author:	Micro electronic and mechanical systems // editor, Zheng Yun Man.
other author:	Yun Man, Zheng.
Published:	Valley Cottage, NY :Scitus Academics LLC, : c2017.,
Description:	viii, 280 p. :ill. ; : 24 cm.;
Subject:	Microelectromechanical systems. -
ISBN:	9781681175034 (cloth) :

Micro electronic and mechanical systems /
Micro electronic and mechanical systems /editor, Zheng Yun Man. - Valley Cottage, NY :Scitus Academics LLC,c2017. - viii, 280 p. :ill. ;24 cm.

Includes bibliographical references and index.

ISBN: 9781681175034 (cloth) :NT4810

LCCN: 2016942842Subjects--Topical Terms:

559134
Microelectromechanical systems.

Dewey Class. No.: 621.381

Micro electronic and mechanical systems /
LDR:00539cam a2200181 a 4500 001 875431
005 20160525162025.0
008 171013s2017 nyua b 001 0 eng
010 $a 2016942842
020 $a 9781681175034 (cloth) : $c NT4810
035 $a 19108773
040 $a DLC $b eng $c NFU
041 0 $a eng
042 $a pcc
082 0 4 $a 621.381
245 0 0 $a Micro electronic and mechanical systems / $c editor, Zheng Yun Man.
260 $a Valley Cottage, NY : $b Scitus Academics LLC, $c c2017.
300 $a viii, 280 p. : $b ill. ; $c 24 cm.
504 $a Includes bibliographical references and index.
650 0 $a Microelectromechanical systems. $3 559134
700 1 $a Yun Man, Zheng. $3 1123639

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621.381 M6262 2017

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