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Principles of MEMS

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Lee, Ki Bang.

Principles of MEMS

Record Type:	Language materials, printed : Monograph/item
Title/Author:	Principles of MEMS/ Ki Bang Lee.
remainder title:	Principles of microelectromechanical systems
Author:	Lee, Ki Bang.
Published:	Hoboken, N.J. :WILEY, : c2010.,
Description:	1 online resource (xii, 667 p.) :ill. :
Notes:	Title from title screen (viewed on Feb. 10, 2011).
Subject:	Microelectromechanical systems. -
Online resource:	http://ieeexplore.ieee.org/xpl/bkabstractplus.jsp?bkn=5628438
ISBN:	9780470649671 (electronic bk.)

Principles of MEMS
Lee, Ki Bang.

Principles of MEMS[electronic resource] /Principles of microelectromechanical systemsKi Bang Lee. - Hoboken, N.J. :WILEY,c2010. - 1 online resource (xii, 667 p.) :ill.

Title from title screen (viewed on Feb. 10, 2011).

Includes bibliographical references (p. 657-659) and index.

ISBN: 9780470649671 (electronic bk.)

Source: 9780470649671IEEEhttp://ieeexplore.ieee.orgSubjects--Topical Terms:

559134
Microelectromechanical systems.
Index Terms--Genre/Form:

554714
Electronic books.

LC Class. No.: TK7875 / .P75 2010

Principles of MEMS
LDR:00978cam 2200277Ia 4500 001 670752
003 OCoLC
005 20110524083456.0
006 m d
007 cr cn|
008 110617s2010 njua ob 101 0 eng d
020 $a 9780470649671 (electronic bk.)
020 $a 0470649674 (electronic bk.)
035 $a (OCoLC)701472338
035 $a ocn701472338
037 $a 9780470649671 $b IEEE $n http://ieeexplore.ieee.org
040 $a IEEEE $b eng $c IEEEE $d CUS
049 $a TWNA
050 4 $a TK7875 $b .P75 2010
100 1 $a Lee, Ki Bang. $3 772763
245 1 0 $a Principles of MEMS $h [electronic resource] / $c Ki Bang Lee.
246 3 $a Principles of microelectromechanical systems
260 $a Hoboken, N.J. : $b WILEY, $c c2010.
300 $a 1 online resource (xii, 667 p.) : $b ill.
500 $a Title from title screen (viewed on Feb. 10, 2011).
504 $a Includes bibliographical references (p. 657-659) and index.
650 0 $a Microelectromechanical systems. $3 559134
655 7 $a Electronic books. $2 local $3 554714
856 4 0 $3 IEEE Xplore $u http://ieeexplore.ieee.org/xpl/bkabstractplus.jsp?bkn=5628438
994 $a 92 $b TWNFU

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