反應式磁控濺鍍.

磁控濺鍍製備SS/WxNy/ WxOyNz /WxOy堆疊結構太陽能選擇性吸收膜 = = SS/WxNy/ WxOyNz /WxOy Selective Absorption Film On Stainless Steel Substrate By Using Reactive Magnetron Sputtering / by: (Language materials, printed)

CrSiN薄膜之光學、電性及熱穩定研究 = = Optical and electrical properties and thermal stability of CrSiN films / by: (Language materials, printed)

selective absorption film.

氮化鎢.

thermal convert.

absorptance(α).

氧化鎢.

氮氧化鎢.

太陽能選擇性吸收膜.

Reactive magnetron sputtering.

熱穩定性.

Optical property.

high temperature.

反應式磁控濺鍍.

光學性質.

電性質.

CrSiN.

concentrating solar collector.

Electrical property.

Thermal stability.

thermal emission(ε).