Oxide film.

鈦鋯薄膜經電漿電解氧化後對其機械性質與生物相容性的影響 = = Mechanical Properties and Biological Performance of Titanium-Zirconium Films after Plasma-Electrolytic Oxidation Treatment / by: (書目-語言資料,印刷品)

臭氧水於晶圓洗淨過程濃度不穩之研究改善 = = Discuss and improvement the question of ozone concentration is unstable in the wafer cleaning process / by: (書目-語言資料,印刷品)

鋯.

Ozone water concentration.

Ozone water flow.

臭氧水流量.

電漿電解氧化法.

Metal contamination.

Particle.

鈦

氧化膜.

Silicon wafer.

臭氧水.

矽晶圓.

臭氧水產生器.

Oxide film.

Plasma-electrolytic oxidation.

枚葉式洗淨機.

臭氧水濃度.

Ozone water.

微粒子.

金屬汙染.

Bioactivity.

生物相容性.

Ozone generator.

Titanium.

Single wafer cleaning machine.

Wafer cleaning.

Zirconium.

晶圓洗淨.