反應式射頻磁控共濺鍍系統.

以反應式射頻磁控共濺鍍系統沉積鈦摻雜氮化鋁硬化膜之研究 = = A study on the Ti-doping aluminum nitride hard coating prepared using the reactive radio frequency magnetron co-sputtering system / by: (Language materials, printed)

有機矽基緩衝層.

機械硬度.

Ti-doped aluminum nitride optical hard coating.

殘留內應力.

Hardness.

Residual stress.

反應式射頻磁控共濺鍍系統.

可撓式塑膠基板.

TMS buffer layer.

Flexible Plastic Substrate.

Adhesion.

附著度.

Flex.

鈦摻雜氮化鋁光學硬化膜.

機械撓曲.

Reactive RF magnetron co-sputtering system.