氮化鈦鋯.

以雙靶高功率脈衝磁控濺鍍共沉積氮化鈦鋯薄膜 = = Deposition of Titanium Zirconium Nitride Thin Films by Using Dual-Cathode High Power Impulsed Magnetron Sputtering / by: (Language materials, printed)

高功率脈衝磁控濺鍍.

TiZrN.

Wear.

熱處理.

氮化鈦鋯.

磨耗.

HiPIMS.

Heat Treatment.