氧電漿蝕刻技術.

氧電漿蝕刻技術對於自組裝奈米球之影響及其應用於提升有機矽基疏水膜特性之研究 = = A study on the self-assembled nanospheres affects by the oxygen plasma etching and its application for improving the hydrophobicity of a organosilicon thin film / by: (Language materials, printed)

hydrophobic properties.

Oxygen plasma etching technology.

polystyrene nanospheres.

silicone based film.

有機矽基薄膜.

氧電漿蝕刻技術.

疏水特性.

聚苯乙烯奈米球.