TiWN barrier layers.

微中含量釕摻雜對於共濺鍍鈷釕合金薄膜特性 = = The Effect of Micro to Moderate Ruthenium Content on the Properties of Co-Sputtered Cobalt-Ruthenium Alloy Films / by: (Language materials, printed)

magnetron Co-Sputtering.

TiWN barrier layers.

鈷釕合金薄膜.

氮化鈦鎢阻障層.

連導線.

磁控共濺鍍.

cobalt-ruthenium alloys.

interconnects.