Microelectromechanical systems - Testing.

Micro and nano mechanical testing of materials and devices by: (Language materials, printed)

Advances in multiphysics simulation and experimental testing of MEMS by: (Language materials, printed)

Measurement technology for micro-nanometer devices by: (Language materials, printed)

Microelectromechanical systems

Tribology, Corrosion and Coatings.

Materials

Surfaces and Interfaces, Thin Films.

Physical measurements.

Nanotechnology.

Chemistry.

Characterization and Evaluation of Materials.

Nanoelectromechanical systems

Nanotechnology

Microtechnology