Plasma etching.

Micromachining using electrochemical discharge phenomenon = fundamentals and applications of spark assisted chemical engraving / by: (書目-語言資料,印刷品)

Low pressure plasmas and microstructuring technology by: (書目-語言資料,印刷品)

Feature profile evolution in plasma processing using on-wafer monitoring system by: (書目-語言資料,印刷品)

Dry etching technology for semiconductors by: (書目-語言資料,印刷品)

Plasma etching processes for CMOS device realization / by: (書目-語言資料,印刷品)

Electronics and Microelectronics, Instrumentation.

Nanotechnology and Microengineering.

Circuits and Systems.

Surfaces and Interfaces, Thin Films.

Atomic and Molecular Structure and Spectra.

Plasma etching.

Metal oxide semiconductors, Complementary.

Nanoscale Science and Technology.

Micromachining.

Nanotechnology.

Electrochemical cutting.

Plasma engineering.

Semiconductors

Plasma (Ionized gases)

Electronic Circuits and Devices.

Electric discharges

Plasma Physics.

Optical and Electronic Materials.

Semiconductors.

Engineering.

Material Science.