Semiconductor wafers.
Overview
| Works: | 3 works in 2 publications in 2 languages | |
|---|---|---|
Titles
Semiconductor wafer fabrication, coatings and tribology = special topic volume with invited peer-reviewed papers only /
by:
(Language materials, printed)
Handbook of 3D integration.. Volume 1 and 2,. Technology and applications of 3D integrated circuits /
by:
(Language materials, printed)