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Semiconductor wafer fabrication, coatings and tribology = special topic volume with invited peer-reviewed papers only /

紀錄類型:	書目-語言資料,印刷品 : Monograph/item
正題名/作者:	Semiconductor wafer fabrication, coatings and tribology/ edited by Juraj Marek ... [et al.]
其他題名:	special topic volume with invited peer-reviewed papers only /
其他作者:	Marek, Juraj.
出版者:	Baech, Switzerland :Trans Tech Publications Ltd, : 2023.,
面頁冊數:	1 online resource :ill. :
標題:	Semiconductor wafers. -
電子資源:	https://portal.igpublish.com/iglibrary/search/TTP0000629.html
ISBN:	9783036413242

Semiconductor wafer fabrication, coatings and tribology = special topic volume with invited peer-reviewed papers only /
Semiconductor wafer fabrication, coatings and tribologyspecial topic volume with invited peer-reviewed papers only /[electronic resource] :edited by Juraj Marek ... [et al.] - 1st ed. - Baech, Switzerland :Trans Tech Publications Ltd,2023. - 1 online resource :ill. - Solid State Phenomena,Vol. 3421662-9779 ;. - Solid State Phenomena ;Vol. 342..

Includes bibliographical references and indexes.

Semiconductor wafer fabrication, coatings and tribology : special topic volume with invited peer-reviewed papers only -- Preface -- Table of Contents -- Chapter 1: Synthesis and Applications of Nanomaterials -- Chapter 2: Semiconductor Wafer Fabrication -- Chapter 3: Coatings and Tribology -- Keyword Index -- Author Index.

Access restricted to authorized users and institutions.

The special edition includes articles that represented the latest research results and engineering solutions in the synthesis of nanomaterials, analysis processes of semiconductor wafer fabrication, and some decisions on coatings and exploration of tribological performance of several polymer and composite materials. This special edition will be interesting to specialists in nanomaterials synthesis, semiconductor power device production and protective coatings in machinery.

Mode of access: World Wide Web.

ISBN: 9783036413242

LCCN: 2023383174Subjects--Topical Terms:

905438
Semiconductor wafers.

LC Class. No.: TK7871.85 / .M371 2023

Dewey Class. No.: 621.38152

Semiconductor wafer fabrication, coatings and tribology = special topic volume with invited peer-reviewed papers only /
LDR:01948cam a2200313 a 4500 001 1136658
005 20241002072503.0
006 m o d
007 cr cnu---unuuu
008 241218s2023 sz a fob 001 0 eng
010 $a 2023383174
020 $a 9783036413242 $q (electronic bk.)
020 $z 9783036403243
035 $a 23414320
040 $a DLC $b eng $c DLC $d DLC
041 0 $a eng
050 4 $a TK7871.85 $b .M371 2023
082 0 4 $a 621.38152 $2 23
245 0 0 $a Semiconductor wafer fabrication, coatings and tribology $h [electronic resource] : $b special topic volume with invited peer-reviewed papers only / $c edited by Juraj Marek ... [et al.]
250 $a 1st ed.
260 $a Baech, Switzerland : $b Trans Tech Publications Ltd, $c 2023.
300 $a 1 online resource : $b ill.
490 1 $a Solid State Phenomena, $x 1662-9779 ; $v Vol. 342
504 $a Includes bibliographical references and indexes.
505 0 $a Semiconductor wafer fabrication, coatings and tribology : special topic volume with invited peer-reviewed papers only -- Preface -- Table of Contents -- Chapter 1: Synthesis and Applications of Nanomaterials -- Chapter 2: Semiconductor Wafer Fabrication -- Chapter 3: Coatings and Tribology -- Keyword Index -- Author Index.
506 $a Access restricted to authorized users and institutions.
520 $a The special edition includes articles that represented the latest research results and engineering solutions in the synthesis of nanomaterials, analysis processes of semiconductor wafer fabrication, and some decisions on coatings and exploration of tribological performance of several polymer and composite materials. This special edition will be interesting to specialists in nanomaterials synthesis, semiconductor power device production and protective coatings in machinery.
538 $a Mode of access: World Wide Web.
588 $a Description based on PDF; viewed 2024-07-13.
650 0 $a Semiconductor wafers. $3 905438
700 1 $a Marek, Juraj. $3 1459670
830 0 $a Solid State Phenomena ; $v Vol. 342. $3 1459671
856 4 0 $u https://portal.igpublish.com/iglibrary/search/TTP0000629.html