Language:
English
繁體中文
Help
Login
Languages
Chinese
(1)
Jump To :
Overview
|
Titles
|
Subjects
陳順祺
Overview
Works:
1 works in 1 publications in 1 languages
Titles
氣體阻障層製備於具有連續沉積-蝕刻有機矽基覆蓋之圖案化表面之研究 = = A Study on the Preparation of a Gas Barrier Coated on Patterned Surface Coveraged by Organosilicon Film Using Consecutive Deposition-Etching Process /
by: 陳順祺
(Language materials, printed)
Subjects
inorganic silicon oxynitride.
organosilicon.
over-cut patterned.
plasma enhanced chemical vapor deposition.
plasma etching.
step coverage.
under-cut patterned.
water vapor permeability.
底切圖案化.
有機矽基薄膜.
水氣滲透率.
無機氮氧化矽.
階梯覆蓋性.
電漿增強化學氣相沉積.
電漿蝕刻.
頂切圖案化.
Processing
...
Change password
Login