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林昇賦
Overview
Works:
2 works in 1 publications in 1 languages
Titles
氣體阻障層結構具底切圖案化光阻表面覆蓋性及機械撓曲特性之研究 = = A Study on the Step Coverage and Mechanical Flexibility of the Gas Barrier Structure deposited onto the Photoresist Surface with Undercut Pattern /
by: 林昇賦
(Language materials, printed)
Subjects
bending reliability.
inorganic silicon oxynitride.
organosilicon.
plasma enhanced chemical vapor deposition.
silicon oxide.
step coverage.
under-cut patterned.
water vapor permeability.
二氧化矽.
底切圖案化.
撓曲測試.
有機矽基薄膜.
水氣滲透率.
無機氮氧化矽.
階梯覆蓋性.
電漿增強化學氣相沉積法.
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