Languages
柯銘禮
Overview
| Works: | 1 works in 1 publications in 1 languages | |
|---|---|---|
Titles
反應性濺鍍製備Ta-Co-N三元合金薄膜與銅金屬化製程整合特性探討 = Evaluation of Ternary Alloy TaCoN Thin Films Deposited by Reactive Sputtering for Copper Metallization
by:
柯銘禮; 方昭訓; Jau-Shiung Fang
(Language materials, printed)