Languages
邱敬富
Overview
Works: | 1 works in 1 publications in 1 languages |
---|
Titles
超薄Ta-Si-C 非晶質擴散阻障層銅製程特性探討 = Ultrathin ta-si-c amorphous films as a diffusion barrier for copper metallization
by:
邱敬富; Jau-Shiung Fang; 方昭訓; Chin-Fu Chiu
(Language materials, printed)