Languages
黃孟碩
Overview
Works: | 1 works in 1 publications in 1 languages |
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Titles
雙層超薄Ru/Ta-Si-C擴散阻障層與銅連導線製程特性探討 = Properties of Ultrathin Ru/TaSiC Bi-Layer Diffusion Barrier for Cu Interconnects
by:
Jau-Shiung Fang; Meng-Shuo Huang; 方昭訓; 黃孟碩
(Language materials, printed)