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酒精催化化學氣相沉積奈米碳管網於前瞻金氧半元件內連線應用研究 = Stu...

鄭錦隆

酒精催化化學氣相沉積奈米碳管網於前瞻金氧半元件內連線應用研究 = Study of carbon nanotube network (cntn) synthesized by alcohol catalytic chemical-vapor-deposition as interconnect of advanced metal-oxide-semiconductor devices

Record Type:	Language materials, printed : monographic
Paralel Title:	Study of carbon nanotube network (cntn) synthesized by alcohol catalytic chemical-vapor-deposition as interconnect of advanced metal-oxide-semiconductor devices
Author:	李韋廷,
Secondary Intellectual Responsibility:	鄭錦隆,
Secondary Intellectual Responsibility:	劉建惟,
Place of Publication:	雲林縣
Published:	國立虎尾科技大學;
Year of Publication:	民98[2009]
Edition:	初版
Description:	110面圖 : 30公分;
Subject:	內連線
Subject:	可靠度
Subject:	奈米碳管網
Subject:	接觸電阻
Subject:	金氧半元件
Subject:	carbon nanotube network (CNTN)
Subject:	contact resistance
Subject:	interconnect
Subject:	metal-oxide-semiconductor
Subject:	reliability
Online resource:	http://cetd.lib.nfu.edu.tw/etdservice/view_metadata?etdun=U0028-1207200916462800

酒精催化化學氣相沉積奈米碳管網於前瞻金氧半元件內連線應用研究 = Study of carbon nanotube network (cntn) synthesized by alcohol catalytic chemical-vapor-deposition as interconnect of advanced metal-oxide-semiconductor devices
李, 韋廷

酒精催化化學氣相沉積奈米碳管網於前瞻金氧半元件內連線應用研究 = Study of carbon nanotube network (cntn) synthesized by alcohol catalytic chemical-vapor-deposition as interconnect of advanced metal-oxide-semiconductor devices / 李韋廷撰 - 初版. - 雲林縣 : 國立虎尾科技大學, 民98[2009]. - 110面 ; 圖 ; 30公分.
含參考書目.
內連線可靠度奈米碳管網接觸電阻金氧半元件carbon nanotube network (CNTN)contact resistanceinterconnectmetal-oxide-semiconductorreliability

鄭, 錦隆

酒精催化化學氣相沉積奈米碳管網於前瞻金氧半元件內連線應用研究 = Study of carbon nanotube network (cntn) synthesized by alcohol catalytic chemical-vapor-deposition as interconnect of advanced metal-oxide-semiconductor devices
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328 $a 碩士論文--國立虎尾科技大學機械與機電工程研究所
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