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呂紹楷
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Works:
1 works in 1 publications in 1 languages
Titles
多層堆疊有機矽基/氮氧化矽氣體阻障層改善水氣滲透及薄膜覆蓋性之研究 = = A Study on Organosilicon / Silicon Oxynitride Multilayered Barrier Structures to Improve Water Vapor Permeability and Step Coverage /
by: 呂紹楷
(Language materials, printed)
Subjects
氮氧化矽.
電漿增強化學氣相沉積.
PECVD.
階梯覆蓋率.
WVTR.
calcium test.
鈣測法.
SiOxNy.
水氣滲透率.
step coverage.
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