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Scaling issues and design of MEMS /

~

Baglio, S.

Scaling issues and design of MEMS /

紀錄類型:	書目-語言資料,印刷品 : Monograph/item
正題名/作者:	Scaling issues and design of MEMS // Salvatore Baglio, Salvatore Castorina, Nicolò Savalli.
其他題名:	Scaling issues and design of microelectromechanical systems
作者:	Baglio, S.
其他作者:	Castorina, Salvatore.
出版者:	Chichester, West Sussex, England ;John Wiley & Sons, : c2007.,
面頁冊數:	xiii, 229 p. :ill. ; : 24 cm.;
標題:	Microelectromechanical systems - Design and construction. -
電子資源:	http://www.loc.gov/catdir/enhancements/fy0810/2007037324-t.html
電子資源:	http://www.loc.gov/catdir/enhancements/fy0834/2007037324-b.html
電子資源:	http://www.loc.gov/catdir/enhancements/fy0743/2007037324-d.html
ISBN:	047001699X

Scaling issues and design of MEMS /
Baglio, S.

Scaling issues and design of MEMS /Scaling issues and design of microelectromechanical systemsSalvatore Baglio, Salvatore Castorina, Nicolò Savalli. - Chichester, West Sussex, England ;John Wiley & Sons,c2007. - xiii, 229 p. :ill. ;24 cm.

Includes bibliographical references and index.

ISBN: 047001699X

LCCN: 2007037324Subjects--Topical Terms:

562714
Microelectromechanical systems
--Design and construction.

LC Class. No.: TK7875 / .B34 2007

Dewey Class. No.: 620.5

Scaling issues and design of MEMS /
LDR:01147cam#a0000277#a 4500 001 575395
003 DLC
005 20080625085509.0
008 070910s2007 enka b 001 0 eng
010 $a 2007037324
020 $a 047001699X
020 $a 9780470016992 : $c US$130.00
035 $a 2007037324
035 $a (OCoLC)171152294
035 $a (OCoLC)ocn171152294
040 $a DLC $c NFU $d BAKER $d BWKUK $d DLC $d YDXCP
041 $a eng
050 0 0 $a TK7875 $b .B34 2007
082 0 0 $2 22 $a 620.5
100 1 # $a Baglio, S. $q (Salvatore) $3 599479
245 1 4 $a Scaling issues and design of MEMS / $c Salvatore Baglio, Salvatore Castorina, Nicolò Savalli.
246 3 $a Scaling issues and design of microelectromechanical systems
260 $a Chichester, West Sussex, England ; $a Hoboken, NJ : $c c2007. $b John Wiley & Sons,
300 $a xiii, 229 p. : $b ill. ; $c 24 cm.
504 # # $a Includes bibliographical references and index.
650 # 0 $a Microelectromechanical systems $x Design and construction. $3 562714
700 1 $a Castorina, Salvatore. $3 599480
700 1 # $a Savalli, Nicol. $3 599481
856 4 1 $3 Table of contents only $u http://www.loc.gov/catdir/enhancements/fy0810/2007037324-t.html
856 4 2 $3 Contributor biographical information $u http://www.loc.gov/catdir/enhancements/fy0834/2007037324-b.html
856 4 2 $3 Publisher description $u http://www.loc.gov/catdir/enhancements/fy0743/2007037324-d.html

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