Microelectromechanical systems - Design and construction.

Overview

Works:	18 works in 10 publications in 10 languages

Titles

Microfabrication and nanomanufacturing by: (Language materials, printed)

CMOS cantilever sensor systems : = atomic force microscopy and gas sensing applications / by: (Language materials, printed)

Scaling issues and design of MEMS / by: (Language materials, printed)

Introduction to microsystem design by: (Language materials, printed)

MEMS : = design and fabrication / by: (Language materials, printed)

Micro electro mechanical system design / by: (Language materials, printed)

Ceramic thick films for MEMS and microdevices by: (Language materials, printed)

Fundamentals of microfabrication and nanotechnology / by: (Language materials, printed)

Introduction to microsystem technology : = a guide for students / by: (Language materials, printed)

Ceramic thick films for MEMS and microdevices / by: (Language materials, printed)

Subjects

Lasers

Levers