Microelectromechanical systems - Design and construction.
Overview
| Works: | 18 works in 10 publications in 10 languages | |
|---|---|---|
Titles
CMOS cantilever sensor systems : = atomic force microscopy and gas sensing applications /
by:
(Language materials, printed)
Design and fabrication of self-powered micro-harvesters DUP_1 = rotating and vibrating micro-power systems /
by:
(Language materials, printed)
Design and fabrication of self-powered micro-harvesters = rotating and vibrating micro-power systems /
by:
(Language materials, printed)
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