Microelectromechanical systems - Design and construction.

Overview
Works: 18 works in 10 publications in 10 languages
Titles
Microfabrication and nanomanufacturing by: (Language materials, printed)
Scaling issues and design of MEMS / by: (Language materials, printed)
Introduction to microsystem design by: (Language materials, printed)
MEMS : = design and fabrication / by: (Language materials, printed)
Micro electro mechanical system design / by: (Language materials, printed)
Ceramic thick films for MEMS and microdevices by: (Language materials, printed)
Ceramic thick films for MEMS and microdevices / by: (Language materials, printed)
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