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Introduction to microsystem design
~
Schomburg, Werner Karl.
Introduction to microsystem design
Record Type:
Language materials, printed : Monograph/item
Title/Author:
Introduction to microsystem design/ by Werner Karl Schomburg.
Author:
Schomburg, Werner Karl.
Published:
Berlin, Heidelberg :Springer-Verlag Berlin Heidelberg, : 2011.,
Description:
xxi, 319 p. :ill., digital ; : 24 cm.;
Series:
RWTHedition,
Contained By:
Springer eBooks
Subject:
Microelectromechanical systems - Design and construction. -
Online resource:
http://dx.doi.org/10.1007/978-3-642-19489-4
ISBN:
9783642194894 (electronic bk.)
Introduction to microsystem design
Schomburg, Werner Karl.
Introduction to microsystem design
[electronic resource] /by Werner Karl Schomburg. - Berlin, Heidelberg :Springer-Verlag Berlin Heidelberg,2011. - xxi, 319 p. :ill., digital ;24 cm. - RWTHedition,1865-0899.
ISBN: 9783642194894 (electronic bk.)Subjects--Topical Terms:
562714
Microelectromechanical systems
--Design and construction.
LC Class. No.: TK7875 / .S36 2011
Dewey Class. No.: 621.381
Introduction to microsystem design
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Introduction to microsystem design
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[electronic resource] /
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by Werner Karl Schomburg.
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Berlin, Heidelberg :
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Springer-Verlag Berlin Heidelberg,
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2011.
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xxi, 319 p. :
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ill., digital ;
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24 cm.
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RWTHedition,
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Microelectromechanical systems
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Design and construction.
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Engineering.
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Nanotechnology and Microengineering.
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Circuits and Systems.
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http://dx.doi.org/10.1007/978-3-642-19489-4
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Engineering (Springer-11647)
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