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MEMS : = design and fabrication /
~
Gad-el-Hak, Mohamed, (1945-)
MEMS : = design and fabrication /
Record Type:
Language materials, printed : Monograph/item
Title/Author:
MEMS :/ edited by Mohamed Gad-el-Hak.
Reminder of title:
design and fabrication /
other author:
Gad-el-Hak, Mohamed,
Published:
Boca Raton, FL :CRC/Taylor & Francis, : 2006.,
Description:
664 p. :ill. ; : 26 cm.;
Notes:
One of three parts whose previous edition was a published as a single volume.
Subject:
Microelectromechanical systems - Design and construction. -
Online resource:
http://www.crcnetbase.com/doi/book/10.1201/9781420036565
ISBN:
9780849391385
MEMS : = design and fabrication /
MEMS :
design and fabrication /edited by Mohamed Gad-el-Hak. - 2nd ed. - Boca Raton, FL :CRC/Taylor & Francis,2006. - 664 p. :ill. ;26 cm. - Mechanical engineering series. - Mechanical engineering series (Boca Raton, Fla.).
One of three parts whose previous edition was a published as a single volume.
Includes bibliographical references and index.
ISBN: 9780849391385
LCCN: 2005050109Subjects--Topical Terms:
562714
Microelectromechanical systems
--Design and construction.
LC Class. No.: TK7875 / .M444 2006
Dewey Class. No.: 621.381
MEMS : = design and fabrication /
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MEMS :
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design and fabrication /
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edited by Mohamed Gad-el-Hak.
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2nd ed.
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Boca Raton, FL :
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CRC/Taylor & Francis,
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2006.
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664 p. :
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ill. ;
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26 cm.
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Mechanical engineering series
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The MEMS handbook
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One of three parts whose previous edition was a published as a single volume.
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Includes bibliographical references and index.
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Also available as an electronic resource.
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CRC Press (http://www.crcpress.com)
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Microelectromechanical systems
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Design and construction.
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562714
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Microfabrication.
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Gad-el-Hak, Mohamed,
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1945-
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Mechanical engineering series (Boca Raton, Fla.)
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http://www.crcnetbase.com/doi/book/10.1201/9781420036565
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BRFL - 001 and 003 fields altered to contain TFG custom control number - 2010/03/12
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