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Micro electro mechanical system design /

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Allen, James J.

Micro electro mechanical system design /

Record Type:	Language materials, printed : Monograph/item
Title/Author:	Micro electro mechanical system design // James J. Allen.
Author:	Allen, James J.
Published:	Boca Raton :Taylor & Francis, : 2005.,
Description:	465 p. :ill. ; : 23 cm.;
Subject:	Microelectromechanical systems - Design and construction. -
Online resource:	http://www.crcnetbase.com/doi/book/10.1201/9781420027754
ISBN:	9780824758240

Micro electro mechanical system design /
Allen, James J.

Micro electro mechanical system design /James J. Allen. - Boca Raton :Taylor & Francis,2005. - 465 p. :ill. ;23 cm. - Mechanical engineering ;192. - Mechanical engineering (Taylor & Francis) ;206..

Includes bibliographical references and index.

ISBN: 9780824758240

LCCN: 2005041771Subjects--Topical Terms:

562714
Microelectromechanical systems
--Design and construction.

LC Class. No.: TK153 / .A47 2005

Dewey Class. No.: 621

Micro electro mechanical system design /
LDR:00929cam a2200253 a 4500 001 664117
003 FlBoTFG
005 20060728190950.0
008 110106s2005 flua b 001 0 eng
010 $a 2005041771
020 $a 9780824758240
020 $a 0824758242 (alk. paper)
035 $a CRC00DK3180000
040 $a DLC $c DLC $d DLC $d FlBoTFG
050 0 0 $a TK153 $b .A47 2005
082 0 0 $a 621 $2 22
092 $a 621 $b A425
100 1 $a Allen, James J. $3 761202
245 1 0 $a Micro electro mechanical system design / $c James J. Allen.
260 $a Boca Raton : $b Taylor & Francis, $c 2005.
300 $a 465 p. : $b ill. ; $c 23 cm.
490 1 $a Mechanical engineering ; $v 192
504 $a Includes bibliographical references and index.
530 $a Also available as an electronic resource. $b CRC Press (http://www.crcpress.com)
650 0 $a Microelectromechanical systems $x Design and construction. $3 562714
650 0 $a Engineering design. $3 560518
830 0 $a Mechanical engineering (Taylor & Francis) ; $v 206. $3 761129
856 4 0 $3 Publisher description $u http://www.crcnetbase.com/doi/book/10.1201/9781420027754
945 $a BRFL - 001 and 003 fields altered to contain TFG custom control number - 2010/03/12

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