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Lecture notes on principles of plasm...
~
Chen, Francis F., (1929-)
Lecture notes on principles of plasma processing /
Record Type:
Language materials, printed : Monograph/item
Title/Author:
Lecture notes on principles of plasma processing // Francis F. Chen and Jane P. Chang.
remainder title:
Principles of plasma processing
Author:
Chen, Francis F.,
other author:
Chang, Jane P.,
Published:
New York :Kluwer Academic/Plenum Publishers, : 2003.,
Description:
ix, 208 p. :ill. ; : 28 cm. +; 1 CD-ROM (4 3/4 in.) +
Subject:
Plasma engineering. -
ISBN:
0306474972 (pbk.) :
Lecture notes on principles of plasma processing /
Chen, Francis F.,1929-
Lecture notes on principles of plasma processing /
Principles of plasma processingFrancis F. Chen and Jane P. Chang. - New York :Kluwer Academic/Plenum Publishers,2003. - ix, 208 p. :ill. ;28 cm. +1 CD-ROM (4 3/4 in.)
ISBN: 0306474972 (pbk.) :EUR69.95
LCCN: 2002040665Subjects--Topical Terms:
559154
Plasma engineering.
LC Class. No.: TA2020 / .C454 2003
Dewey Class. No.: 621.044
Lecture notes on principles of plasma processing /
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