Plasma engineering.
Overview
Works: | 13 works in 7 publications in 7 languages |
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Titles
Plasma-aided nanofabrication : = from plasma sources to nanoassembly /
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Cold plasma in materials fabrication = from fundamentals to applications /
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Plasma engineering = applications from aerospace to bio- and nanotechnology /
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Feature profile evolution in plasma processing using on-wafer monitoring system
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