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Cold plasma in materials fabrication...
~
Grill, Alfred.
Cold plasma in materials fabrication = from fundamentals to applications /
Record Type:
Language materials, printed : Monograph/item
Title/Author:
Cold plasma in materials fabrication/ Alfred Grill.
Reminder of title:
from fundamentals to applications /
Author:
Grill, Alfred.
Published:
Piscataway, NJ :IEEE Press ; : c1994.,
Description:
1 online resource (xiii, 257 p.) :ill. :
Subject:
Plasma engineering. -
Online resource:
http://ieeexplore.ieee.org/xpl/bkabstractplus.jsp?bkn=5271223
ISBN:
9780470544273
Cold plasma in materials fabrication = from fundamentals to applications /
Grill, Alfred.
Cold plasma in materials fabrication
from fundamentals to applications /[electronic resource] :Alfred Grill. - Piscataway, NJ :IEEE Press ;c1994. - 1 online resource (xiii, 257 p.) :ill.
Includes bibliographical references and index.
1. Fundamentals of Plasma -- 2. Cold Plasma Generation -- 3. Plasma Chemistry -- 4. Plasma Reactors -- 5. Plasma Diagnostics -- 6. Cold Plasma Processes for Surface Modification -- 7. Deposition of Coatings by PECVD -- 8. Plasma Assisted Etching.
ISBN: 9780470544273
Source: 9780470544273IEEEhttp://ieeexplore.ieee.orgSubjects--Topical Terms:
559154
Plasma engineering.
Index Terms--Genre/Form:
554714
Electronic books.
LC Class. No.: TA2020 / .G75 1994
Dewey Class. No.: 621.044
Cold plasma in materials fabrication = from fundamentals to applications /
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Cold plasma in materials fabrication
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[electronic resource] :
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from fundamentals to applications /
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Alfred Grill.
260
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Piscataway, NJ :
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IEEE Press ;
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New York :
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Institute of Electrical and Electronics Engineers,
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c1994.
300
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1 online resource (xiii, 257 p.) :
$b
ill.
504
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Includes bibliographical references and index.
505
0
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1. Fundamentals of Plasma -- 2. Cold Plasma Generation -- 3. Plasma Chemistry -- 4. Plasma Reactors -- 5. Plasma Diagnostics -- 6. Cold Plasma Processes for Surface Modification -- 7. Deposition of Coatings by PECVD -- 8. Plasma Assisted Etching.
588
$a
Description based on print version record.
650
0
$a
Plasma engineering.
$3
559154
650
0
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Low temperature plasmas.
$3
700786
650
0
$a
Manufacturing processes.
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564466
650
6
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Plasmas, Technique des.
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772427
650
6
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Plasmas froids.
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772428
650
6
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Fabrication.
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702368
655
4
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Electronic books.
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local
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554714
856
4 0
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IEEE Xplore
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http://ieeexplore.ieee.org/xpl/bkabstractplus.jsp?bkn=5271223
994
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92
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