國立虎尾科技大學 |

登入

回首頁

Cold plasma in materials fabrication...

Grill, Alfred.

Cold plasma in materials fabrication = from fundamentals to applications /

紀錄類型:	書目-語言資料,印刷品 : Monograph/item
正題名/作者:	Cold plasma in materials fabrication/ Alfred Grill.
其他題名:	from fundamentals to applications /
作者:	Grill, Alfred.
出版者:	Piscataway, NJ :IEEE Press ; : c1994.,
面頁冊數:	1 online resource (xiii, 257 p.) :ill. :
標題:	Plasma engineering. -
電子資源:	http://ieeexplore.ieee.org/xpl/bkabstractplus.jsp?bkn=5271223
ISBN:	9780470544273

Cold plasma in materials fabrication = from fundamentals to applications /
Grill, Alfred.

Cold plasma in materials fabricationfrom fundamentals to applications /[electronic resource] :Alfred Grill. - Piscataway, NJ :IEEE Press ;c1994. - 1 online resource (xiii, 257 p.) :ill.

Includes bibliographical references and index.

1. Fundamentals of Plasma -- 2. Cold Plasma Generation -- 3. Plasma Chemistry -- 4. Plasma Reactors -- 5. Plasma Diagnostics -- 6. Cold Plasma Processes for Surface Modification -- 7. Deposition of Coatings by PECVD -- 8. Plasma Assisted Etching.

ISBN: 9780470544273

Source: 9780470544273IEEEhttp://ieeexplore.ieee.orgSubjects--Topical Terms:

559154
Plasma engineering.
Index Terms--Genre/Form:

554714
Electronic books.

LC Class. No.: TA2020 / .G75 1994

Dewey Class. No.: 621.044

Cold plasma in materials fabrication = from fundamentals to applications /
LDR:01258cam 2200301Ia 4500 001 670636
003 OCoLC
005 20121225141944.0
006 m o d
007 cr cn|
008 130624s1994 njua ob 001 0 eng d
020 $a 9780470544273
020 $a 0470544279
029 1 $a GBVCP $b 714994987
035 $a (OCoLC)557450028
035 $a ocn557450028
037 $a 9780470544273 $b IEEE $n http://ieeexplore.ieee.org
040 $a IEEEE $b eng $c IEEEE $d OCLCQ
049 $a HISA
050 4 $a TA2020 $b .G75 1994
082 0 4 $a 621.044 $2 22
100 1 $a Grill, Alfred. $3 772426
245 1 0 $a Cold plasma in materials fabrication $h [electronic resource] : $b from fundamentals to applications / $c Alfred Grill.
260 $a Piscataway, NJ : $b IEEE Press ; $a New York : $b Institute of Electrical and Electronics Engineers, $c c1994.
300 $a 1 online resource (xiii, 257 p.) : $b ill.
504 $a Includes bibliographical references and index.
505 0 $a 1. Fundamentals of Plasma -- 2. Cold Plasma Generation -- 3. Plasma Chemistry -- 4. Plasma Reactors -- 5. Plasma Diagnostics -- 6. Cold Plasma Processes for Surface Modification -- 7. Deposition of Coatings by PECVD -- 8. Plasma Assisted Etching.
588 $a Description based on print version record.
650 0 $a Plasma engineering. $3 559154
650 0 $a Low temperature plasmas. $3 700786
650 0 $a Manufacturing processes. $3 564466
650 6 $a Plasmas, Technique des. $3 772427
650 6 $a Plasmas froids. $3 772428
650 6 $a Fabrication. $3 702368
655 4 $a Electronic books. $2 local $3 554714
856 4 0 $3 IEEE Xplore $u http://ieeexplore.ieee.org/xpl/bkabstractplus.jsp?bkn=5271223
994 $a 92 $b TWHIS

筆 0 讀者評論

多媒體

評論

新增評論分享你的心得

Export

取書館別