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Nanolithography = the art of fabrica...

Feldman, Martin,

Nanolithography = the art of fabricating nanoelectronic and nanophotonic devices and systems /

紀錄類型:	書目-語言資料,印刷品 : Monograph/item
正題名/作者:	Nanolithography/ edited by Martin Feldman.
其他題名:	the art of fabricating nanoelectronic and nanophotonic devices and systems /
其他作者:	Feldman, Martin,
出版者:	Oxford :Woodhead Publishing, : 2014.,
面頁冊數:	xxiv, 573 p. :ill. ; : 25 cm.;
標題:	Nanolithography. -
電子資源:	click for full text (2015 TAEBDC PDA eBooks Trial, Trial Period: 2015.6.3-2015.12.31)
ISBN:	9780857095008 (electronic bk.)

Nanolithography = the art of fabricating nanoelectronic and nanophotonic devices and systems /
Nanolithographythe art of fabricating nanoelectronic and nanophotonic devices and systems /[electronic resource] :edited by Martin Feldman. - Oxford :Woodhead Publishing,2014. - xxiv, 573 p. :ill. ;25 cm. - Woodhead Publishing series in electronic and optical materials ;no. 42. - Woodhead Publishing series in electronic and optical materials ;no. 27..

Includes bibliographical references and index.

ISBN: 9780857095008 (electronic bk.)Subjects--Topical Terms:

1028721
Nanolithography.

LC Class. No.: TK7874.843 / .N368 2014

Dewey Class. No.: 621.381531

Nanolithography = the art of fabricating nanoelectronic and nanophotonic devices and systems /
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490 1 $a Woodhead Publishing series in electronic and optical materials ; $v no. 42
504 $a Includes bibliographical references and index.
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700 1 $a Feldman, Martin, $e editor of compilation. $3 1028720
830 0 $a Woodhead Publishing series in electronic and optical materials ; $v no. 27. $3 916978
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