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Nanolithography = the art of fabrica...

Feldman, Martin,

Nanolithography = the art of fabricating nanoelectronic and nanophotonic devices and systems /

Record Type:	Language materials, printed : Monograph/item
Title/Author:	Nanolithography/ edited by Martin Feldman.
Reminder of title:	the art of fabricating nanoelectronic and nanophotonic devices and systems /
other author:	Feldman, Martin,
Published:	Oxford :Woodhead Publishing, : 2014.,
Description:	xxiv, 573 p. :ill. ; : 25 cm.;
Subject:	Nanolithography. -
Online resource:	click for full text (2015 TAEBDC PDA eBooks Trial, Trial Period: 2015.6.3-2015.12.31)
ISBN:	9780857095008 (electronic bk.)

Nanolithography = the art of fabricating nanoelectronic and nanophotonic devices and systems /
Nanolithographythe art of fabricating nanoelectronic and nanophotonic devices and systems /[electronic resource] :edited by Martin Feldman. - Oxford :Woodhead Publishing,2014. - xxiv, 573 p. :ill. ;25 cm. - Woodhead Publishing series in electronic and optical materials ;no. 42. - Woodhead Publishing series in electronic and optical materials ;no. 27..

Includes bibliographical references and index.

ISBN: 9780857095008 (electronic bk.)Subjects--Topical Terms:

1028721
Nanolithography.

LC Class. No.: TK7874.843 / .N368 2014

Dewey Class. No.: 621.381531

Nanolithography = the art of fabricating nanoelectronic and nanophotonic devices and systems /
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005 20150629141839.0
008 150720s2014 enka sb 001 0 eng
020 $a 9780857095008 (electronic bk.)
020 $a 9780857095008
035 $a 15000839
040 $a UKMGB $b eng $c UKMGB $d OCLCO $d BDX $d YDXCP $d CDX $d IXA $d CaSSU
041 0 $a eng
050 4 $a TK7874.843 $b .N368 2014
082 0 4 $a 621.381531 $2 23
245 0 0 $a Nanolithography $h [electronic resource] : $b the art of fabricating nanoelectronic and nanophotonic devices and systems / $c edited by Martin Feldman.
260 $a Oxford : $b Woodhead Publishing, $c 2014.
300 $a xxiv, 573 p. : $b ill. ; $c 25 cm.
490 1 $a Woodhead Publishing series in electronic and optical materials ; $v no. 42
504 $a Includes bibliographical references and index.
650 0 $a Nanolithography. $3 1028721
700 1 $a Feldman, Martin, $e editor of compilation. $3 1028720
830 0 $a Woodhead Publishing series in electronic and optical materials ; $v no. 27. $3 916978
856 4 0 $u http://www.sciencedirect.com/science/book/9780857095008 $z click for full text (2015 TAEBDC PDA eBooks Trial, Trial Period: 2015.6.3-2015.12.31)

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