Nanolithography.
Overview
Works: | 8 works in 7 publications in 7 languages |
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Titles
Nanoimprint biosensors : = the fusion of nanofabrication, nanophotonics, and nanobiology /
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Nanoimprint lithography = an enabling process for nanofabrication /
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Nanolithography = the art of fabricating nanoelectronic and nanophotonic devices and systems /
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Subjects