Coaxial lithography
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  • Coaxial lithography
  • Record Type: Language materials, printed : Monograph/item
    Title/Author: Coaxial lithography/ by Tuncay Ozel.
    Author: Ozel, Tuncay.
    Published: Cham :Springer International Publishing : : 2016.,
    Description: xxix, 92 p. :ill., digital ; : 24 cm.;
    Contained By: Springer eBooks
    Subject: Nanolithography. -
    Online resource: http://dx.doi.org/10.1007/978-3-319-45414-6
    ISBN: 9783319454146
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