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氣體阻障層製備於具底角優化之底切圖案化表面之研究 = = A Study...

劉華文

氣體阻障層製備於具底角優化之底切圖案化表面之研究 = = A Study on the Preparation of a Gas Barrier Coated on Optimization Undercut Pattern Surface /

Record Type:	Language materials, printed : Monograph/item
Title/Author:	氣體阻障層製備於具底角優化之底切圖案化表面之研究 =/ 劉華文撰.
Reminder of title:	A Study on the Preparation of a Gas Barrier Coated on Optimization Undercut Pattern Surface /
remainder title:	A Study on the Preparation of a Gas Barrier Coated on Optimization Undercut Pattern Surface.
Author:	劉華文
Published:	雲林縣 :國立虎尾科技大學 , : 民106.07.,
Description:	[9], 93面 :圖, 表 ; : 30公分.;
Notes:	指導教授：劉代山.
Subject:	有機矽基薄膜. -
Online resource:	http://cetd.lib.nfu.edu.tw/etdservice/view_metadata?etdun=U0028-2407201715590800

氣體阻障層製備於具底角優化之底切圖案化表面之研究 = = A Study on the Preparation of a Gas Barrier Coated on Optimization Undercut Pattern Surface /
劉華文

氣體阻障層製備於具底角優化之底切圖案化表面之研究 =A Study on the Preparation of a Gas Barrier Coated on Optimization Undercut Pattern Surface /A Study on the Preparation of a Gas Barrier Coated on Optimization Undercut Pattern Surface.劉華文撰. - 初版. - 雲林縣 :國立虎尾科技大學 ,民106.07. - [9], 93面 :圖, 表 ;30公分.

指導教授：劉代山.

含參考書目.Subjects--Topical Terms:

1086398
有機矽基薄膜.

氣體阻障層製備於具底角優化之底切圖案化表面之研究 = = A Study on the Preparation of a Gas Barrier Coated on Optimization Undercut Pattern Surface /
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246 3 1 $a A Study on the Preparation of a Gas Barrier Coated on Optimization Undercut Pattern Surface.
250 $a 初版.
260 # $a 雲林縣 : $b 國立虎尾科技大學 , $c 民106.07.
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504 $a 含參考書目.
650 # 4 $a 有機矽基薄膜. $3 1086398
650 # 4 $a 無機氮氧化矽. $3 1086397
650 # 4 $a 電漿增強化學氣相沉積法. $3 998644
650 # 4 $a 水氣滲透率. $3 996118
650 # 4 $a 階梯覆蓋性. $3 1086396
650 # 4 $a 底切圖案化. $3 1086395
650 # 4 $a 快速電漿沉積. $3 1126965
650 # 4 $a 田口法. $3 995557
650 # 4 $a 選擇性沉積. $3 1126964
650 # 4 $a organosilicon. $3 1086392
650 # 4 $a inorganic silicon oxynitride. $3 1086391
650 # 4 $a plasma enhanced chemical vapor deposition. $3 1086390
650 # 4 $a water vapor permeability. $3 1086389
650 # 4 $a step coverage. $3 1045680
650 # 4 $a under-cut patterned. $3 1086388
650 # 4 $a rapid plasma deposition. $3 1126963
650 # 4 $a Taguchi method. $3 995267
650 # 4 $a selective deposition. $3 1126962
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