有機矽基薄膜.
Overview
Works: | 6 works in 5 publications in 5 languages |
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Titles
氧電漿蝕刻技術對於自組裝奈米球之影響及其應用於提升有機矽基疏水膜特性之研究 = = A study on the self-assembled nanospheres affects by the oxygen plasma etching and its application for improving the hydrophobicity of a organosilicon thin film /
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具厚膜修飾圖案化水氣阻障層撓曲及照光可靠性之研究 = = Study on the flexure and illumination reliability of the thick film modified patterned water vapor barrier /
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氣體阻障層製備於具有連續沉積-蝕刻有機矽基覆蓋之圖案化表面之研究 = = A Study on the Preparation of a Gas Barrier Coated on Patterned Surface Coveraged by Organosilicon Film Using Consecutive Deposition-Etching Process /
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氣體阻障層製備於具底角優化之底切圖案化表面之研究 = = A Study on the Preparation of a Gas Barrier Coated on Optimization Undercut Pattern Surface /
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Subjects