Microsystems and MEMS.

Overview
Works: 35 works in 14 publications in 14 languages
Titles
Contact-electrification of matter by: (Language materials, printed)
Precision machining process and technology by: (Language materials, printed)
Micro and nanomanufacturing.. Volume II by: (Language materials, printed)
Nano-photonics for advanced networks by: (Language materials, printed)
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