Plasma etching.
Overview
| Works: | 8 works in 3 publications in 3 languages | |
|---|---|---|
Titles
Micromachining using electrochemical discharge phenomenon = fundamentals and applications of spark assisted chemical engraving /
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(Language materials, printed)
Feature profile evolution in plasma processing using on-wafer monitoring system
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(Language materials, printed)
A Systematic Study of GaN Static Induction Transistors (a.k.a. Vertical FinFETs) for RF Applications.
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(Language materials, manuscript)
Growth and Characterization of Boron Nitride Thin Films and Nanostructures Using Atomic Layer Deposition = = Bor Nitrur Ince Filmlerin ve Nanoyapilarin Atomik Katman Biriktirme Yontemi Ile Buyutulmesi ve Karakterizasyonu.
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(Language materials, manuscript)
Molecular Beam Epitaxy of AlGaN Epilayers on Foreign Substrates for Semiconductor Deep Ultraviolet Lasers.
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(Language materials, manuscript)
Subjects