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Plasma etching.

概要

作品:	8 作品在 3 項出版品 3 種語言

書目資訊

Micromachining using electrochemical discharge phenomenon = fundamentals and applications of spark assisted chemical engraving / by: (書目-語言資料,印刷品)

Low pressure plasmas and microstructuring technology by: (書目-語言資料,印刷品)

Feature profile evolution in plasma processing using on-wafer monitoring system by: (書目-語言資料,印刷品)

Dry etching technology for semiconductors by: (書目-語言資料,印刷品)

Plasma etching processes for CMOS device realization / by: (書目-語言資料,印刷品)

A Systematic Study of GaN Static Induction Transistors (a.k.a. Vertical FinFETs) for RF Applications. by: (書目-語言資料,手稿)

Growth and Characterization of Boron Nitride Thin Films and Nanostructures Using Atomic Layer Deposition = = Bor Nitrur Ince Filmlerin ve Nanoyapilarin Atomik Katman Biriktirme Yontemi Ile Buyutulmesi ve Karakterizasyonu. by: (書目-語言資料,手稿)

Molecular Beam Epitaxy of AlGaN Epilayers on Foreign Substrates for Semiconductor Deep Ultraviolet Lasers. by: (書目-語言資料,手稿)

主題

Electronics and Microelectronics, Instrumentation.

Nanotechnology and Microengineering.

Biology.

Surfaces and Interfaces, Thin Films.

Electrical engineering.

Metal oxide semiconductors, Complementary.

Plasma physics.

Atomic layer epitaxy.

Micromachining.

Molecular beam epitaxy.

Crystal structure.

Electrochemical cutting.

Semiconductors

Carbon.

Plasma (Ionized gases)

Electronic Circuits and Devices.

Boron.

Plasma Physics.

Semiconductors.

By products.

Temperature.

Lasers.

Nitrogen.

Engineering.

Transistors.

Decomposition.

Interfaces.

Condensed matter physics.

Physics.

Microelectromechanical systems.

Material Science.

Names.

Nanowires.

Geometry.

Thin films.

Scanning electron microscopy.

Zinc.

Circuits and Systems.

Gallium arsenide.

Atomic and Molecular Structure and Spectra.

Light emitting diodes.

Plasma etching.

Nanoscale Science and Technology.

Analytical chemistry.

Mechanical engineering.

Nanotechnology.

Load.

Plasma engineering.

Chemical vapor deposition.

Energy.

Optics.

Electric discharges

Aluminum.

Optical and Electronic Materials.