Electrolytic polishing.

軸流輔助電解拋光對純鎳表面品質之研究 = = Study on Surface Quality of Pure Nickel Morphology Using Axial Flow Enhanced Electrolytic Polishing Process / by: (Language materials, printed)

Advances in CMP/polishing technologies for the manufacture of electronic devices by: (Language materials, printed)

I-V曲線.

Surface roughness.

電解拋光.

鈍化層.

純鎳材料.

軸向流場.

Electrolytic polishing.

I-V curve.

Viscous layer.

Grinding and polishing.

表面粗糙度.

Pure nickel material.

Axial flow field.