氮氧化矽.

以電漿增強化學氣相沉積法製備氮氧化矽氣體阻障層之研究 = = A Study on the Preparation of Silicon Oxynitride Gas Barrier by Using Plasma Enhanced Chemical Vapor Deposition / by: (Language materials, printed)

可撓式塑膠基板上製備有機/無機氮氧化矽多層氣體阻障層及其機械撓曲特性之研究 = = A Study on Mechanical Flexibility of Silicon Oxynitride and Organic/inorganic Multilayered Barrier Structures Deposited on Flexible Plastic Substrates / by: (Language materials, printed)

多層堆疊有機矽基/氮氧化矽氣體阻障層改善水氣滲透及薄膜覆蓋性之研究 = = A Study on Organosilicon / Silicon Oxynitride Multilayered Barrier Structures to Improve Water Vapor Permeability and Step Coverage / by: (Language materials, printed)

氮氧化矽氣體阻障層在不同波長紫外光照射下之環境可靠性研究 = = A Study on The Environment Stability of Silicon Oxide Nitride Gas Barrier Film Irradiated under Various Ultraviolet Wavelengths / by: (Language materials, printed)

電漿增強化學氣相沉積法.

silicon oxynitride.

PECVD.

calcium test.

水氧穿透率.

氣體阻障層.

鈣測法.

SiOxNy.

水氣滲透率.

step coverage.

氮氧化矽.

plasma-enhanced chemical vapor deposition.

電漿增強化學氣相沉積.

UV resistant.

WVTR.

gas barrier layer.

抗UV.

water vapor permeability.

階梯覆蓋率.