高功率脈衝磁控濺鍍.
概要
| 作品: | 6 作品在 6 項出版品 6 種語言 | |
|---|---|---|
書目資訊
佔空比對高攻率脈衝磁控濺鍍氮化鈦鋁薄膜顯微結構與性質之影響 = = Influence of Duty Cycle on Microstructure and Properties of TiAlN Films Synthesized by High Power Impulse Magnetron Sputtering /
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(書目-語言資料,印刷品)
製程參數對於濺鍍碳化鉻薄膜機械性質之影響 = = Effects of Process Parameters on the Mechanical Properties Performances of the Reactive Sputtering Deposited Chromium-Carbon Coatings /
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(書目-語言資料,印刷品)
以雙靶高功率脈衝磁控濺鍍共沉積氮化鈦鋯薄膜 = = Deposition of Titanium Zirconium Nitride Thin Films by Using Dual-Cathode High Power Impulsed Magnetron Sputtering /
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(書目-語言資料,印刷品)
主題