Lithography.

EUV sources for lithography by: (Language materials, printed)

Chemistry and lithography by: (Language materials, printed)

Electrohydrodynamic patterning of functional materials by: (Language materials, printed)

奈米深度玻璃流道中磁性流體之毛細充填現象 = = Capillary Filling of Ferrofluid in One Dimensional Nanochannels / by: (Language materials, printed)

以微模轉印製程製作高分子脊樑式波導光柵 = = Using Micro-Mold Transfer Printing Process to Fabricate Polymer Ridge Waveguide Grating Filter / by: (Language materials, printed)

Design for manufacturability with advanced lithography by: (Language materials, printed)

Physical design and mask synthesis for directed self-assembly lithography by: (Language materials, printed)

Electronics and Microelectronics, Instrumentation.

Nanotechnology and Microengineering.

Surfaces and Interfaces, Thin Films.

Ferrofluid.

Self-assembly (Chemistry)

Electrohydrodynamics.

Nanoscale Science and Technology.

Polymer Sciences.

Extreme ultraviolet lithography.

Photoresists.

Lithography.

磁性流體.

微影製程.

Nanotechnology.

奈米流道.

Plasma (Ionized gases)

Chemistry, Technical.

Capillary filling.

Wet etching.

黃光微影.

光柵.

optical waveguide.

Optical and Electronic Materials.

Semiconductors.

Nanochannels.

光波導.

Engineering.

grating.

Ultraviolet radiation

Materials Science.

Optics, Optoelectronics, Plasmonics and Optical Devices.

毛細充填.

濕式蝕刻.

Processor Architectures.

Thin films.

Integrated circuits

Circuits and Systems.

Surface and Interface Science, Thin Films.