PECVD.
Overview
| Works: | 11 works in 11 publications in 11 languages | |
|---|---|---|
Titles
利用緩衝層結構改善薄膜沉積於壓克力基板附著度之研究 = = A Study of the Adhesion Improvement on a Thin Film Deposited on the PMMA Substrate Using Buffer-Layered Structure /
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利用電漿化學氣相沉積二氧化鈦光觸媒薄膜分解水中環境賀爾蒙與細菌 = = Titanium Dioxide Photocatalyst Films Deposited by PECVD to Decompose Environmental Hormone and Bacteria in Water /
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以PECVD製程製備SiNxHy與SiO2探討在不同生醫基材的機械性質之研究 = = Mechanical Properties Study of SiNxHy and SiO2 on Different Bio-substrates Prepared with PECVD /
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利用鈣測試法量測水氣滲透率之研究 = = Study on The Water Vapor Transmission Rate Using Calcium Test Method /
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氧化鈦/金屬表面微型異質結構之光觸媒活性與殺菌特性之研究 = = Characteristic on the Photocatalytic Activity and Sterilization of a Surface Titanium Oxide/Metal Micro-heterostructures /
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利用電漿增強化學氣相沉積製備二氧化矽多層膜應用於有機發光二極體之封裝 = = The Preparation of SiO2 Multi-layers by Plasma Chemical Vapor Deposition for The Encapsulation of Organic Light Emitting Diodes /
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物理氣相與化學氣相沉積類鑽碳薄膜之微結構、機械性質與腐蝕研究 = = Mechancical Properties and Corrosion of DLC Films by PVD and PECVD Process /
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氧化鈦/銀表面微型結構之光觸媒活性與殺菌特性之研究 = = Characteristic on the Photocatalytic Activity and Sterilization of a Titanium Oxide / Silver Surface Micro-structures /
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多層堆疊有機矽基/氮氧化矽氣體阻障層改善水氣滲透及薄膜覆蓋性之研究 = = A Study on Organosilicon / Silicon Oxynitride Multilayered Barrier Structures to Improve Water Vapor Permeability and Step Coverage /
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有機發光二極體薄膜封裝之研究 = = The Study of Thin Film Encapsulation for OLED /
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