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覺文郁

Overview
Works: 1 works in 38 publications in 1 languages
Titles
介觀機具線性軸性能檢測系統之建立 = The development of the linear axis measurement system of Meso-Scale machining by: 周敬棠; Rong-Feng Tsai; Wen-Yuh Jywe; Ching-Tang Chou; 蔡榮鋒; 覺文郁 (Language materials, printed) , [指導]
應用於壓印設備之奈米級對位系統開發 = Development of a Nano-Positioning alignment stage for the nano imprint device by: 覺文郁; 陳世欣; 陳柏宇; Wen-Yuh Jywe; Po-Yu Chen; Shih-Hsin Chen (Language materials, printed)
多軸奈米級微動平台之順滑同動循跡控制 = Sliding-Mode Tracking Control of a Multi-Axis Nanopositioner by: Wen-Yuh Jywe; 翁豐在; 覺文郁; 簡裕特 (Language materials, printed) , [指導]
鏟花工件表面鏟花技術開發 = Development of a Scraping and Measuring Method for the Scraping-Workpiece by: 覺文郁; Ming-Chi Chiang; 邱國慶; Kuo-Ching Chiu; Wen-Yuh Jywe; 江明冀 (Language materials, printed)
新型三自由度繞射雷射光學尺系統 = A novel three-degree-of-freedom diffraction type laser linear encoder by: Wen-Yuh Jywe; Chien-Hung Liu; 劉建宏; 覺文郁; Hsin-Hao Teng; 鄧信豪信豪 (Language materials, printed)
三自由度光學尺量測系統 = A Novel Diffraction Type Three-degree-of-Freedom Laser Linear Encoder by: Wen-Yuh Jywe; 吳星助; 覺文郁 (Language materials, printed) , [指導]
以電容嵌入法應用於三自由度Z-tilts微動平台之控制 = Tracking control of the three degrees of freedom Z-tilts micropositioning stage using the capacitor insertion method by: 覺文郁; 劉建宏; 陳財源; 國立虎尾科技大學; Wen-Yuh Jywe; Chien-hung Liu; Tsai-Yuan Chen (Language materials, printed)
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Subjects
travel parallelism Laser encoder confocal DVD optical pickup piezoelectric stage Five axis machines Dynamic Test 四象感測器 DVD pickup motion accuracy Bio-detection 哥德式螺紋 the ISO 10791-6 reflectors PI-like fuzzy control 幾何誤差 Machine tools 微動平台,壓電致動器,直度誤差,四象限檢測器 長{EFA888} laser displacement meter Interferometer DVD讀頭 光柵 non–contact optical measurement 光學非接觸式檢測 雷射干涉儀 geometric error 操作介面 PSD 田口式品質工程方法 三角雷射探頭 geometric five-axis CNC machine tool 3Dspatial position test 晶圓 幾何誤差檢測 繞射 quadrantdetector 共焦DVD雷射讀取頭 Five-degree-of freedom 精密定位 多自由度 角隅菱鏡 triangulation laser 工具機 行走平行度 Meso-scale machining Lithography Instrument 繞射光柵 Angular 磁性伸縮球桿 精密機具校正 position sensing detection 振動 機電整合 DVD& 3-axis moving stage X-Y stage 微凹面鏡 Taguchi method Thermal Effect 誤差分析 二十一個誤差 dual-beam laser interferometer 線性馬達 Diffraction grating 三軸同動 stepping motor grating corner-cube 循跡控制 Nano-Stage Ultra-precision micro machining three-degrees-of freedom 三自由{EFA881} precision-stage 垂直度誤差 體積誤差 3-DOF H-type stage machine tool calibration 平面反射鏡 encoder Air Bearing indexing Nanometer-Sctage alignment User Interface interference vibrameter 四象限檢測器 干涉量 MEMS, Micro-concave Mirror capacitive position sensors straightness error Scraping measurement 位置感測器 CNC五軸工具機 precision positioning 雷射位移計 interferometer piezoelectric actuated 4 DOF H型定位平台 光學尺 二維光學尺 nano-positioning alignment system 角隅稜鏡 線性軸 運動軌跡曲線 Volume error Quadrant detector 角度誤差 automatic scraping 壓電平台 linear encoder 多軸微動平台 直度誤差 the static error 壓電致動器 linear axis and rotary axis DVD Pickup 三維空間定位檢測 cross-coupled control squareness error nano-imprint Linear motor 生物檢測 tracking control & Three-degrees-of-freedom Scraping 鏟花 quadrant detector Magnetic Telescoping Ball Bar 精密平台 X-Y定位平台 控制解析度 control resolution 鏟花檢測 the dynamic error 角度量測 動態檢測 6-degree of freedom measurement system. 21 Errors QD 對位 ball screw nano-stage Polarization method Freedom Long stroke Linear stage Diffractive method Multi-degrees-of-freedom flexible Hinges 運動準確度 旋轉軸 線性馬達平台 線性滑軌 PI型模糊控制 雙光束雷射干涉儀 自動鏟花 Three Dimension Measurement PZT 微動平台 Nanostage scraping 四自由度 三軸移動平台 電容式探頭 奈米級對位系統 步進馬達 machine tool Plane Encoder wafer 有限元素法 error analysis 交叉耦合控制 六自由度量測系統 angular error rotation error Geometry Error Test calibration of precision machine tools 四象限感測器 Hysteresis linear guide Ball Screw 旋轉軸誤差 三自由度 corner cube 三維檢測 奈米壓印 空氣軸承 quarter detector 微機電系統 線性平台
 
 
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